Three-dimensional ultrasound imaging using custom integrated electronics combined with capacitive micromachined ultrasonic transducers
There is increasing demand for three-dimensional (3D) medical
ultrasound imaging; compared to conventional two-dimensional (2D) ultrasound imaging, 3D ultrasound
imaging simplifies examinations and provides better quantitative data. High-quality 3D ultrasound
imaging depends on large 2D arrays of ultrasound transducers. Compactly connecting to a 2D
transducer array and achieving good receive sensitivity requires a close connection between the
transducer array and electronics. This thesis examines the design of integrated circuits (ICs) for
3D ultrasound imaging and their integration with 2D capacitive micromachined ultrasonic transducers
(CMUTs). The successful flip-chip bonding of a 16×16-element CMUT array to a singlechannel
custom-designed IC demonstrates an integrated 3D ultrasound imaging system. The IC provides each
element of the array with a 25-V unipolar pulser and a transimpedance amplifier. Characterization
of flip-chip bonded devices shows 100% yield, 125% fractional bandwidth, 339 kPa transmit pressure,
and 1.2 mPa/√Hz input-referred noise. Three-dimensional images reconstructed using classic
synthetic aperture imaging demonstrate the imaging capability of the device. Additionally, acquired
photoacoustics images demonstrate the device’s utility for the emerging field of photoacoustics
imaging. Compared to a single-channel system, using multiple elements in parallel for both transmit
and receive improves image contrast and signal-to-noise ratio (SNR). Simulated point spread
functions (PSFs) for a 16×16-element array show that using the 32 elements along the array
diagonals for receive and the remaining elements for transmit (FT-XR-NC) results in a PSF
comparable to the one obtained when using the full array for both transmit and receive. An IC with
programmable delays and 16 parallel receive channels implements the FT-XR-NC array design.
Measurements of pulser output voltages and the sound pressure level at the focal point show that
the pulser delays have about 5 ns accuracy and that the IC can generate arbitrarily focused
ultrasound beams. Images acquired of a latex heart phantom demonstrate the IC’s imaging capability.
The work presented in this thesis shows a reliable method for connecting an integrated circuit to a
2D CMUT array for 3D ultrasound imaging. Characterization of CMUT arrays flip-chip bonded to
custom-designed integrated circuits demonstrate 3D imaging capability, high yield, good receive
sensitivity, and the wide bandwidth of micromachined ultrasonic transducers.
