PUBLICATIONS

Conference Papers

• A. Nikoozadeh, Ö. Oralkan, M. Gencel, J. W. Choe, D. N. Stephens, A. de la Rama, P. Chen, K. Thomenius, A. Dentinger, D. Wildes, K. Shivkumar, A. Mahajan, M. O’Donnell, D. Sahn and P. T. Khuri-Yakub, "Forward-looking volumetric intracardiac imaging using a fully integrated CMUT ring array," presented at the IEEE Ultrason. Symp., Rome, Italy, September 2008.

• I. O. Wygant, M. Kupnik, and B. T. Khuri-Yakub, "CMUT design equations for optimizing noise figure and source pressure," presented at the IEEE Ultrason. Symp., Rome, Italy, September 2008.

• R. Wodnicki, C. G. Woychik, A. T. Byun, R. Fisher, K. Thomenius, D.-S. Lin, X. Zhuang, O. Oralkan, S. Vaithilingam and B. T. Khuri-Yakub, "Multi-row linear cMUT array using cMUTs and multiplexing electronics," presented at the IEEE Ultrason. Symp., Rome, Italy, September 2008.

• D.-S. Lin, X. Zhuang, J. Faruque, Ö. Oralkan, S. Napel, R. B. Jeffrey, and B. T. Khuri-Yakub, "Carotid peak blood velocity detection using a 5-plane CMUT array with asymmetric acoustic lens: initial results," presented at the IEEE Ultrason. Symp., Rome, Italy, September 2008.

• P. Cristman, O. Oralkan, X. Zhuang, T.-J. Ma, S. Vaithilingam, T. Carver, I. Wygant, and B. T. Khuri-Yakub, "A 2D CMUT hydrophone array: characterization results," presented at the IEEE Ultrason. Symp., Rome, Italy, September 2008.

• D. J. Sahn, S. N. Douglas, J. M. Cannata, K. K. Shung, O. Oralkan, A. Nikoozadeh, B. T. Khuri-Yakub, H. Nguyen, P. Chen, A. M. Dentinger, D. Wildes, K. E. Thomenius, A. Mahajan, K. Shivkumar, M. O’Donnell, , "A family of intracardiac ultrasound imaging devices designed for guidance of electrophysiology ablation procedures," presented at the 31st Annual International IEEE EMBS Conference, Minneapolis, MN, USA, Sept. 2-6, 2009.

• H. J. Lee, K. K. Park, P. Cristman, Ö. Oralkan, M. Kupnik, and B. T. Khuri-Yakub, "A low-noise oscillator based on a multi-membrane CMUT for high sensitivity resonant chemical sensors," Proc. 22th IEEE MEMS Conference, Sorrento, Italy, pp. 761-764, 2009.

• S. H. Wong, M. Kupnik, K. B. Pauly, and B. T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducer (CMUT) for MR-guided noninvasive therapeutic ultrasound applications," Proc. Solid-State Sensors, Actuators and Microsystems Conference, pp. 354 - 357, 2009.

• A. Nikoozadeh, I. O. Wygant, D.-S. Lin, Ö. Oralkan, K. Thomenius, A. Dentinger, D. Wildes, G. Akopyan, K. Shivkumar, A. Mahajan, D. N. Stephens, M. O’ Donnell, D. Sahn, and P. T. Khuri-Yakub, , "Intracardiac forward-looking ultrasound imaging catheters using capacitive micromachined ultrasonic transducers,," Acoust. Imag., vol. 30, 2009.

• A. De La Zerda, Z. Liu, C. Zavaleta, S. Bodapati, R. Teed, S. Vaithilingam, T.-J. Ma, O. Oralkan, X. Chen, B. T. Khuri-Yakub, H. Dai, and S. S. Gambhir, "Enhanced sensitivity carbon nanotubes as targeted photoacoustic molecular imaging agents ," Proc. SPIE, vol. 7177, 2009.

• A. De La Zerda, C. Zavaleta, S. Keren, S. Vaithilingam, S. Bodapati, R. Teed, Z. Liu, J. Levi, B. R. Smith, T.-J. Ma, O. Oralkan, Z. Cheng, X. Chen, B. T. Khuri-Yakub, H. Dai, and S. S. Gambhir, "Photoacoustic molecular imaging using single walled carbon nanotubes in living mice ," Proc. SPIE, vol. 7177, 2009.

• M. Kupnik, I. O. Wygant, and B. T. Khuri-Yakub, "Finite element analysis of stress stiffening effects in CMUTs," in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 487-490, 2008.

• H. J. Lee, K. K. Park, P. Cristman, Ö. Oralkan, M. Kupnik and, B. T. Khuri-Yakub, "The effect of parallelism of CMUT cells on phase noise for chem./bio sensor applications," in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 1951-1954, 2008.

• K. K. Park, H. J. Lee, P. Cristman, M. Kupnik, Ö. Oralkan, and B. T. Khuri-Yakub, "Optimum design of circular CMUT membranes for high quality factor in air," in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 504-507, 2008.

• K. K. Park, H. J. Lee, M. Kupnik, Ö. Oralkan, and B. T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducer as a chemical sensor," in Proc. IEEE Sensors, Salento, Italy, pp. 05-08, 2008.

• S. Vaithilingam, T.-J. Ma, Y. Furukawa, O. Oralkan, A. Kamaya, K. Torashima, M. Kupnik, I. O. Wygant, X. Zhuang, R. B. Jeffrey Jr, and B. T. Khuri-Yakub, "Investigating large 2D arrays for photoacoustic and acoustic imaging using CMUT technology ," in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 1238-1241, 2008.

• S. H. Wong, M. Kupnik, B. T. Khuri-Yakub, R. D. Watkins, K. Butts Pauly, "Progress in CMUTs for HIFU ablation of upper abdominal cancer," in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 2068-2071, 2008.

• I. O. Wygant, M. Kupnik, and B. T. Khuri-Yakub, "Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell ," in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 2111-2114, 2008.

• I. O. Wygant, M. Kupnik, B. T. Khuri-Yakub, M. S. Wochner, W. M. Wright, and M. F. Hamilton, "The design and characterization of capacitive micromachined ultrasonic transducers (CMUTs) for generating high-intensity ultrasound for transmission of directional audio ," in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 2100-2102, 2008.

• S. H. Wong, R. D. Watkins, M. Kupnik, and B. T. Khuri-Yakub, "Progress in development of HIFU CMUTs for use under MR-guidance ," in AIP Conference Proceedings, 8th International Symposium on Therapeutic Ultrasound, Minneapolis, MN,, vol. 1113, p. 327-31, 2008.

• H. J. Lee, K. K. Park, Ö. Oralkan, M. Kupnik, and B. T. Khuri-Yakub, "CMUT as a chemical sensor for DMMP Detection," in Proc. IEEE Intern. Frequ. Contr. Symp., Honolulu, Hawaii, pp. 434-439, 2008.

• K. K. Park, H. J. Lee, M. Kupnik, Ö. Oralkan, and B. T. Khuri-Yakub, "Fabricating capacitive micromachined ultrasonic transducers with direct wafer-bonding and LOCOS technology," Proc. 21th IEEE MEMS Conference, Tucson, USA, pp. 339-342, 2008.

• M. Kupnik, A. S. Ergun, Y. Huang, and B. T. Khuri-Yakub, "Extended insulation layer structure for CMUTs," in Proc. IEEE Ultrason. Symp., New York, USA, pp. 511-514, 2007.

• D. S. Lin, X. Zhuang, S. H. Wong, A. S. Ergun, M. Kupnik, and B. T. Khuri-Yakub, "Characterization of fabrication related gap-height variations in capacitive micromachined ultrasonic transducers," in Proc. IEEE Ultrason. Symp., New York, USA, pp. 523-526, 2007.

• A. Nikoozadeh, I. O. Wygant , D.S. Lin, Ö. Oralkan, A. S. Ergun, K. Thomenius, A. Dentinger, D. Wildes, G. Akopyan, K. Shivkumar, A. Mahajan, D. N. Stephens, D. Sahn, and B. T. Khuri-Yakub, "Fully integrated CMUT-based forward-looking intracardiac imaging for electrophysiology," in Proc. IEEE Ultrason. Symp., New York, USA, pp. 900-903, 2007.

• S. Vaithilingam, T. J. Ma, Y. Furukawa, A. Zerda, Ö. Oralkan, A. Kamaya, S. Keren, S. S. Gambhir, R. B. Jeffrey Jr, and B. T. Khuri-Yakub, "A co-axial scanning acoustic and photoacoustic microscope," in Proc. IEEE Ultrason. Symp., New York, USA, pp. 2413-2416, 2007.

• S. H. Wong, M. Kupnik, K. Butts-Pauly, and B. T. Khuri-Yakub, "Advantages of capacitive micromachined ultrasonics transducers (CMUTs) for high intensity focused ultrasound (HIFU)," in Proc. IEEE Ultrason. Symp., New York, USA, pp. 1313-1316, 2007.

• I. O. Wygant, M. Kupnik, J. C. Windsor, W. M. Wright, G. Yaralioglu, M. S. Wochner, M. F. Hamilton, and B. T. Khuri-Yakub, "50-kHz capacitive micromachined ultrasonic transducers for generating highly directional sound with parametric arrays," in Proc. IEEE Ultrason. Symp., New York, USA, pp. 519-522, 2007.

• I. Wygant, N. S. Jamal, H. J. Lee, A. Nikoozadeh, X. Zhuang, O. Oralkan, A. S. Ergun, M. Karaman, and B. T. Khuri-Yakub, "An integrated circuit with transmit beamforming and parallel receive channels for 3D ultrasound imaging: Testing and characterization," in Proc. IEEE Ultrason. Symp., New York, USA, pp. 25-28, 2007.

• X. Zhuang, I. O. Wygant, D. S. Lin, M. Kupnik, Ö. Oralkan, and B. T. Khuri-Yakub, "Trench-isolated CMUT arrays with a supporting frame: Characterization and imaging results," in Proc. IEEE Ultrason. Symp., New York, USA, pp. 507-510, 2007.

• M. Kupnik, E. Krasser, and M. Gröschl, "Absolute transit time detection for ultrasonic gas flowmeters based on time and phase domain characteristics," in Proc. IEEE Ultrason. Symp., New York, USA, pp. 142-145, 2007.

• A. de la Zerda, S. Keren, S. Vaithilingam, Ö. Oralkan, B. T. Khuri-Yakub, and S. S. Gambhir, "A new simulation tool for photoacoustic molecular imaging validated with an experimental imaging system," presented at the Joint Molecular Imaging Conference, Providence, RI, Sep. 8-11, 2007.

• S. Keren, A. de la Zerda, J. Levi, S. Vaithilingam, Ö. Oralkan, B. T. Khuri-Yakub, and S. S. Gambhir, "Photoacoustic tomography with high resolution small animal ultrasound system," presented at the Joint Molecular Imaging Conference, Providence, RI, Sep. 8-11, 2007.

• S. H. Wong, A. Ergun, G. G. Yaralioglu, Ö. Oralkan, M. Kupnik, R. K. Butts, and B. T. Khuri-Yakub, "Design of HIFU CMUT Arrays for Treatment of Liver and Renal Cancer," in AIP Conference Proceedings, Therapeutic Ultrasound: 6th International Symposium on Therapeutic Ultrasound, vol. 911, pp. 54-60, May, 2007.

• X. Zhuang, D.-S. Lin, O. Oralkan, and B. T. Khuri-Yakub, "Flexible CMUT Arrays with Through-Wafer Electrical Interconnects Based on Trench Refilling with PDMS," 8th Annual Ultrasonic Transducer Engineering Conference, Los Angeles, CA , to appear, Apr., 2007.

• K. K. Park, H. J. Lee, G. Yaralioglu, O. Oralkan, M. Kupnik, and B. T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers for chemical detection in air," Microsystems Technology Symposium, San Jose, CA , to appear, Mar., 2007.

• X. Zhuang, D. Lin, Ö. Oralkan, B. T. Khuri-Yakub, "Flexible transducer arrays with through-wafer electrical interconnects based on trench refilling with PDMS," Proc. 20th IEEE MEMS Conference, Kobe, Japan, pp. 73-76, Jan., 2007.

• S. Vaithilingam, I. O. Wygant, S. Sifferman, X. Zhuang, Y. Furukawa, Ö. Oralkan, S. Keren, S. S. Gambhir and B. T. Khuri-Yakub, "Tomographic photoacoustic imaging using capacitive micromachined ultrasonic transducer (CMUT) technology," in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 397-400, 2006.

• S. H. Wong, A. Ergun, G. G. Yaralioglu, Ö. Oralkan, E. Liu, M. Kupnik, R. K. Butts, and B. T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers for high intensity focused ablation of upper abdominal tumors," in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 841-844, 2006.

• X. Zhuang, A. S. Ergun, Ö. Oralkan, and B. T. Khuri-Yakub, "Trench isolated CMUT arrays with a supporting frame," in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 1955-1958, 2006.

• G. G. Yaralioglu, B. Bayram, and B. T. Khuri-Yakub, "Finite Element Analysis of CMUTS: Conventional vs. Collapse Operation Modes," in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 586-589, 2006.

• B. Bayram, G. G. Yaralioglu, M. Kupnik, and B. T. Khuri-Yakub, "Acoustic Crosstalk Reduction Method for CMUT Arrays," in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 590-593, 2006.

• M. Kupnik, A. S. Ergun, G. G. Yaralioglu, B. Bayram, S. H. Wong, D. S. Lin, Ö. Oralkan, and B. T. Khuri-Yakub, "Finite element analysis of fabrication related thermal effects in capacitive micromachined ultrasonic transducers," in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 938-941, 2006.

• M. Kupnik, A. Schröder, and M. Gröschl, "Adaptive Asymmetric Double-Path Ultrasonic Transit-Time Gas Flowmeter," in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 2429-2432, 2006.

• I. O. Wygant, H. J. Lee, A. Nikoozadeh, Ö. Oralkan, M. Karaman, and B. T. Khuri-Yakub, "An integrated circuit with transmit beamforming and parallel receive channels for real-time three-dimensional ultrasound imaging," in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 2186-2189, 2006.

• I. Wygant, M. Karaman, Ö. Oralkan, and B. T. Khuri-Yakub, "Volumetric imaging using fan-beam scanning with reduced redundancy 2D arrays," in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 2190-2193, 2006.

• D. N. Stephens, J. Cannata, R. Liu, K. K. Shung, Ö. Oralkan, A. Nikoozadeh, B. T. Khuri-Yakub, H. Nguyen, R. Chia, A. Dentinger, D. Wildes, K. Kim, M. O’Donnell, and D. Sahn, "Forward looking intracardiac imaging catheters for electrophysiology," in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 702-705, 2006.

• S.H. Wong, I.O. Wygant, D.T. Yeh, X. Zhuang, B. Bayram, M. Kupnik, O.Oralkan, A.S. Ergun, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Capacitive Micromachined Ultrasonic Transducer Arrays for Integrated Diagnostic/Therapeutic Catheters," in AIP Conference Proceedings, Therapeutic Ultrasound: 5th International Symposium on Therapeutic Ultrasound, vol. 829, no. 1, pp. 395-399, May, 2006.

• I.O. Wygant, Mustafa Karaman, O. Oralkan, and B.T. Khuri-Yakub, "Beamforming and Hardware Design for a Multichannel Front-end Iintegrated Circuit for Real-time 3D Catheter-based Ultrasonic Imaging," in Proceedings of SPIE Med. Imag. Conf., vol. 6147, pp.1-8, Mar. 2006.

• X. Zhuang, A.S. Ergun, O. Oralkan, I.O. Wygant, and B.T. Khuri-Yakub, "Interconnection and Packaging for 2D Capacitive Micromachined Ultrasonic Transducer Arrays Based on Through-Wafer Trench Isolation," in Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on, pp. 270- 273, Jan. 2006.

• I.O. Wygant, D.T. Yeh, X. Zhuang, A. Nikoozadeh, O.Oralkan, A.S. Ergun, M. Karaman, and B.T. Khuri-Yakub, "A Miniature Real-time Volumetric Ultrasound Imaging System," in Proceedings of SPIE, Medical Imaging 2005: Ultrasonic Imaging and Signal Processing, William F. Walker, Stanislav Y. Emelianov, Editors, vol. 5750, pp. 26-36, Apr. 2005.

• X. Zhuang, I.O. Wygant, D.T. Yeh, A. Nikoozadeh, O.Oralkan, A.S. Ergun, C.H. Cheng, Y. Huang, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Two-dimensional capacitive micromachined ultrasonic transducer (cMUT) arrays for a miniature integrated volumetric ultrasonic imaging system," in Proceedings of SPIE, Medical Imaging 2005: Ultrasonic Imaging and Signal Processing, William F. Walker, Stanislav Y. Emelianov, Editors, vol. 5750, pp. 37-46, Apr. 2005.

• G.G. Yaralioglu, B. Bayram, A. Nikoozadeh, and B.T. P. Khuri-Yakub, "Finite element modeling of capacitive micromachined ultrasonic transducers," in Proceedings of SPIE, Medical Imaging 2005: Ultrasonic Imaging and Signal Processing, William F. Walker, Stanislav Y. Emelianov, Editors, vol. 5750, pp. 77-86, Apr. 2005.

• D.T. Yeh, O.Oralkan, A.S. Ergun, X. Zhuang, I.O. Wygant, and B.T. Khuri-Yakub, "High-frequency cMUT arrays for high-resolution medical imaging," in Proceedings of SPIE, Medical Imaging 2005: Ultrasonic Imaging and Signal Processing, William F. Walker, Stanislav Y. Emelianov, Editors, vol. 5750, pp. 87-98, Apr. 2005.

• I.O. Wygant, D.T. Yeh, X. Zhuang, S. Vaithilingam, A. Nikoozadeh, O. Oralkan, A.S. Ergun, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Integrated ultrasound imaging systems based on capacitive micromachined ultrasonic transducer arrays," Proc. IEEE Sensors, pp. 4 pp. 30, Nov. 2005.

• I.O. Wygant, X. Zhuang, P.S. Kuo, D.T. Yeh, O. Oralkan, and B.T. Khuri-Yakub, "Photoacoustic imaging using a two-dimensional cMUT array," in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.4, pp. 1921- 1924, Sept. 2005.

• I.O. Wygant, X. Zhuang, D.T. Yeh, S. Vaithilingam, A. Nikoozadeh, O. Oralkan, A.S. Ergun, M. Karaman, and B.T. Khuri-Yakub, "An endoscopic imaging system based on a two-dimensional cMUT array: real-time imaging results," in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.2, pp. 792- 795, Sept. 2005.

• D.T. Yeh, O. Oralkan, I.O. Wygant, M. O'Donnell, and B.T. Khuri-Yakub, "3-D ultrasound imaging using forward viewing cMUT ring arrays for intravascular and intracardiac applications," in Ultrasonics Symposium, 2005 IEEE, vol.2, pp. 783- 786, Sept. 2005.

• D.T. Yeh, O. Oralkan, I.O. Wygant, A.S. Ergun, J.H. Wong, and B.T. Khuri-Yakub, "High-resolution imaging with high-frequency 1-D linear cMUT arrays," in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, pp. 665- 668, Sept. 2005.

• B. Bayram, M. Kupnik, G.G. Yaralioglu, O. Oralkan, D. Lin, X. Zhuang, A.S. Ergun, A.F. Sarioglu, S.H. Wong, and B.T. Khuri-Yakub, "Characterization of cross-coupling in capacitive micromachined ultrasonic transducers," in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, pp. 601- 604, Sept. 2005.

• S.H. Wong, G.C. Scott, S.M. Conolly, G. Narayan, D.H. Liang, "Intravascular Ultrasound Array For Treatment of Atrial Fibrillation," in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, pp. 1751- 1754, Sept. 2005.

• Y. Huang, E.O. Haggstrom, X. Zhuang, A.S. Ergun, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers (cMUTs) with piston-shaped membranes," in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, pp. 589- 592, Sept. 2005.

• R. Fisher, K. Thomenius, R. Wodnicki, R. Thomas, S. Cogan, C. Hazard, W. Lee, D. Mills, B.T. Khuri-Yakub, A.S. Ergun, and G.G. Yaralioglu, "Reconfigurable arrays for portable ultrasound," in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, pp. 495- 499, Sept. 2005.

• X. Zhuang, A.S. Ergun, O. Oralkan, Y. Huang, I.O. Wygant, G.G. Yaralioglu, D.T. Yeh, and B.T. Khuri-Yakub, "Through-wafer trench-isolated electrical interconnects for cMUT arrays," in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, no.pp. 475- 478, 18-21 Sept. 2005.

• A.S. Ergun, X. Zhuang, Y. Huang, O. Oralkan, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducer technology for medical ultrasound imaging," in Proceedings of SPIE, Medical Imaging 2005: Ultrasonic Imaging and Signal Processing, William F. Walker, Stanislav Y. Emelianov, Editors, vol. 5750, pp. 58-68, April 2005.

• Y. Huang, E.O. Haeggstrom, X. Zhuang, A.S. Ergun, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers (cMUTs) with isolation posts," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.3, pp. 2223- 2226, vol.3, 23-27 Aug. 2004.

• B. Bayram, G.G. Yaralioglu, A.S. Ergun, O. Oralkan, and B.T. Khuri-Yakub, "Dynamic FEM analysis of multiple cMUT cells in immersion [capacitive micromachined ultrasonic transducers]," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 252- 255, vol.1, 23-27 Aug. 2004.

• A. Nikoozadeh, B. Bayram, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Analytical calculation of collapse voltage of cMUT membrane [capacitive micromachined ultrasonic transducers]," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 256- 259, vol.1, 23-27 Aug. 2004.

• Y. Huang, E.O. Haeggstrom, X. Zhuang, A.S. Ergun, and B.T. Khuri-Yakub, "Optimized membrane configuration improves cMUT performance," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 505- 508, vol.1, 23-27 Aug. 2004.

• O. Oralkan, S.T. Hansen, B. Bayram, G.G. Yaralioglu, A.S. Ergun, and B.T. Khuri-Yakub, "cMUT ring arrays for forward-looking intravascular imaging," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 403- 406, vol.1, 23-27 Aug. 2004.

• O. Oralkan, S.T. Hansen, B. Bayram, G.G. Yaralioglu, A.S. Ergun, and B.T. Khuri-Yakub, "High-frequency cMUT arrays for high-resolution medical imaging," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 399- 402, 23-27 Aug. 2004.

• I.O. Wygant, X. Zhuang, D.T. Yeh, A. Nikoozadeh, O. Oralkan, A.S. Ergun, M. Karaman, and B.T. Khuri-Yakub, "Integrated ultrasonic imaging systems based on cMUT arrays: recent progress," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 391- 394, 23-27 Aug. 2004.

• G.G. Yaralioglu, A.S. Ergun, Y. Huang, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers for robotic sensing applications," in Intelligent Robots and Systems, 2003. (IROS 2003). Proceedings. 2003 IEEE/RSJ International Conference on, vol.3, pp. 2347- 2352, Oct. 2003.

• G.G. Yaralioglu, M.H. Badi, A.S. Ergun, and B.T. Khuri-Yakub, "Improved equivalent circuit and finite element method modeling of capacitive micromachined ultrasonic transducers," in Proc. IEEE Ultrason. Symp., Honolulu, Hawaii, vol.1, pp. 469- 472, 5-8 Oct. 2003.

• J.A. Johnson, O. Oralkan, A.S. Ergun, U. Demirci, M. Karaman, and B.T. Khuri-Yakub, "Phased subarray imaging for low-cost, wideband coherent array imaging," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.2, pp. 1875- 1878, 5-8 Oct. 2003.

• M.H. Badi, G.G. Yaralioglu, A.S. Ergun, Y. Huang and B.T. Khuri-Yakub, "Improved modeling and fabrication techniques for capacitive micromachined ultrasonic Lamb wave transducers," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 585- 588, 5-8 Oct. 2003.

• U. Demirci, G.G. Yaralioglu, E. Haeggstrom, G. Percin, and B.T. Khuri-Yakub, "2D acoustically actuated micromachined droplet ejector array," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.2, pp. 1983- 1986, 5-8 Oct. 2003.

• B. Bayram, E. Haeggstrom, A.S. Ergun, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Dynamic analysis of cMUTs in different regimes of operation," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 481- 484, 5-8 Oct. 2003.

• Y. Huang, E. Haeggstrom, B. Bayram, X. Zhuang, A.S. Ergun, C.H. Cheng, and B.T. Khuri-Yakub, "Collapsed regime operation of capacitive micromachined ultrasonic transducers based on wafer-bonding technique," in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.2, pp. 1161- 1164, 5-8 Oct. 2003.

• G. Percin, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Micromachined fluid ejector arrays for biotechnological and biomedical applications," in Robotics and Automation, 2003. Proceedings. ICRA '03. IEEE International Conference on, vol.2, pp. 2892- 2894, 14-19 Sept. 2003.

• U. Demirci, G.G. Yaralioglu, A.S. Ergun, G. Percin, and B.T. Khuri-Yakub, "Fabrication of Acoustically Actuated Flextensional Single Crystal Silicon 2-D Micromachined Ejector Arrays," TECHON 2003, Dallas, TX, , Aug. 2003.

• U. Demirci, G.G. Yaralioglu, A.S. Ergun, G. Percin, and B.T. Khuri-Yakub, "Acoustically Actuated Flextensional 2-D Micromachined Ejector Arrays," SEMICONWEST 2003, San Francisco, CA, , Jul. 2003.

• Y. Huang, A.S. Ergun, E. Haeggstrom, and B.T. Khuri-Yakub, "New fabrication process for Capacitive Micromachined Ultrasonic Transducers," in Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on, pp. 522- 525, 19-23 Jan. 2003.

• H. Jagannathan, G.G. Yaralioglu, A.S. Ergun, and B.T. Khuri-Yakub, "An implementation of a microfluidic mixer and switch using micromachined acoustic transducers," in Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on, pp. 104- 107, 19-23 Jan. 2003.

• H. Jagannathan, G.G. Yaralioglu, A.S. Ergun, and B.T. Khuri-Yakub, "Acoustic heating and thermometry in microfluidic channels," in Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on, pp. 474- 477, 19-23 Jan. 2003.

• S.T. Hansen, A.S. Ergun, and B.T. Khuri-Yakub, "Wideband micromachined acoustic sensors with radio frequency detection," in Proceedings of SPIE, Unattended Ground Sensor Technologies and Applications V, Edward M. Carapezza, Editor, vol. 5090, pp. 42-50, September 2003.

• H. Jagannathan, G.G. Yaralioglu, A.S. Ergun, and B.T. Khuri-Yakub, "Ultrasonic temperature control and measurement in microfluidic channels," in Proceedings of SPIE, Microfluidics, BioMEMS, and Medical Microsystems, Holger Becker, Peter Woias, Editors, vol. 4982, pp. 243-247, January 2003.

• B.T. Khuri-Yakub, A.S. Ergun, Y. Huang, C.-H.Cheng, O. Oralkan, J. Johnson, G.G. Yaralioglu, and M. Karaman, "Micromachined ultrasonic transducers and their use for 2D and 3D imaging," in Acoustical Imaging , , 2003.

• K. Kaviani, B.T. Khuri-Yakub, O. Oralkan, and B.A. Wooley, "A multichannel, pipeline analog–to–digital converter for an integrated 3–D ultrasound imaging system," in Solid-State Circuits Conference, 2002. ESSCIRC 2002. Proceedings of the 28th European, vol., pp. 263- 266, 24-26 Sept. 2002.

• A.S. Ergun, C.H. Cheng, U. Demirci, and B.T. Khuri-Yakub, "Fabrication and characterization of 1-dimensional and 2-dimensional Capacitive Micromachined Ultrasonic Transducer (cMUT) arrays for 2-dimensional and volumetric ultrasonic imaging," in Oceans '02 MTS/IEEE, vol.4, pp. 2361- 2367, 29-31 Oct. 2002.

• Y. Huang, A.S. Ergun, E. Haeggstrom, and B.T. Khuri-Yakub, "Fabrication of Capacitive Micromachined Ultrasonic Transducers (cMUTs) using wafer bonding technology for low frequency (10 kHz-150 kHz) sonar applications," in Oceans '02 MTS/IEEE, vol.4, pp. 2322- 2327, 29-31 Oct. 2002.

• J.A. Johnson, M. Karaman, and B.T. Khuri-Yakub, "Phased subarray processing for underwater 3D acoustic imaging," in Oceans '02 MTS/IEEE, vol.4, pp. 2145- 2151, 29-31 Oct. 2002.

• O. Oralkan, A.S. Ergun, C.H. Cheng, J.A. Johnson, M. Karaman, T.H. Lee, and B.T. Khuri-Yakub, "Volumetric imaging using 2D capacitive micromachined ultrasonic transducer arrays (cMUTs): initial results," in Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE, vol.2, pp. 1083- 1086, 8-11 Oct. 2002.

• A.S. Ergun, Y. Huang, C.H. Cheng, O. Oralkan, J.A. Johnson, H. Jagannathan, U. Demirci, G.G. Yaralioglu, M. Karaman, and B.T. Khuri-Yakub, "Broadband capacitive micromachined ultrasonic transducers ranging from 10 kHz to 60 MHz for imaging arrays and more," in Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE, vol.2, pp. 1039- 1043, 8-11 Oct. 2002.

• M.H. Badi, G.G. Yaralioglu, A.S. Ergun, S.T. Hansen, and B.T. Khuri-Yakub, "Lamb wave devices based on capacitive micromachined ultrasonic transducers," in Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE, vol.2, pp. 1031- 1034, 8-11 Oct. 2002.

• O. Oralkan, A.S. Ergun, C.H. Cheng, J.A. Johnson, M. Karaman, and B.T. Khuri-Yakub, "Underwater acoustic imaging using capacitive micromachined ultrasonic transducer arrays," in Oceans '02 MTS/IEEE, vol.4, pp. 2354- 2360, 29-31 Oct. 2002.

• S.T. Hansen, A.S. Ergun, and B.T. Khuri-Yakub, "Acoustic sensing with capacitive micromachined membranes and radio frequency detection," in Presented at the 2001 Meeting of the MSS Specialty Group on Battlefield Acoustic Ad Seismic Sensing, Magnetic and Electric Field Sensors, Johns Hopkins University, Laurel, MD, vol. 1, Oct. 23, 2002.

• C.H. Cheng, A.S. Ergun, and B.T. Khuri-Yakub, "Electrical through silicon wafer interconnects for high frequency photodetector arrays," in IEEE Photonic Devices and Systems Packaging Symposium, Stanford, CA, , Jul. 14 - 16, 2002.

• C.H. Cheng, A.S. Ergun, and B.T. Khuri-Yakub, "Electrical through wafer interconnects with 0.05 picofarad parasitic capacitance on 400 µm thick silicon substrate," in Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, SC, , Jun. 2 - 6, 2002.

• J.A. Johnson, M. Karaman, and B.T. Khuri-Yakub, "Synthetic phased array image formation and restoration," in Acoustics, Speech, and Signal Processing, 2002. Proceedings. (ICASSP '02). IEEE International Conference on, vol.3, pp. 2885- 2888, 13-17 May. 2002.

• J.A. Johnson, M. Karaman, and B.T. Khuri-Yakub, "Image formation and restoration using multi-element synthetic array processing," in Medical Imaging 2002 : Ultrasonic Imaging and Signal Processing, Proc. SPIE, San Diego, CA, vol. 4687, pp. 37 - 46, Feb. 23 - 28, 2002.

• E. Haeggstrom, G.G. Yaralioglu, A.S. Ergun, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducer based integrated actuator for atomic force microscope cantilevers," in Nanotechnology, 2002. IEEE-NANO 2002. Proceedings of the 2002 2nd IEEE Conference on, pp. 45- 49, 2002.

• H. Jagannathan, G.G. Yaralioglu, A.S. Ergun, F.L. Degertekin, and B.T. Khuri-Yakub, "Micro-fluidic channels with integrated ultrasonic transducers," in Ultrasonics Symposium, 2001 IEEE, Atlanta GA, pp.859-862, vol.2, 7-10 Oct. 2001.

• S.T. Hansen, A.S. Ergun, and B.T. Khuri-Yakub, "Improved modeling and design of microphones using radio frequency detection with capacitive micromachined ultrasonic transducers," in Ultrasonics Symposium, 2001 IEEE, Atlanta GA, vol.2, pp.961-964, 7-10 Oct. 2001.

• U. Demirci, O. Oralkan, J.A. Johnson, A.S. Ergun, M. Karaman, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducer arrays for medical imaging: experimental results," in Ultrasonics Symposium, 2001 IEEE, Atlanta GA, vol.2, pp.957-960, 7-10 Oct. 2001.

• G.G. Yaralioglu, A.S. Ergun, B. Bayram, T. Marentis, and B.T. Khuri-Yakub, "Residual stress and Young's modulus measurement of capacitive micromachined ultrasonic transducer membranes," in Ultrasonics Symposium, 2001 IEEE, Atlanta GA, vol.2, pp.953-956, 7-10 Oct. 2001.

• B.T. Khuri-Yakub, M. Karaman, C.H. Cheng, S. Ergun, G.G. Yaralioglu, B.Bayram, U. Demirci, S. Hansen, M. Badi, O. Oralkan, "Micromachine Capacitor Ultrasonic Transducers," 10thUS-Japan Seminar on Dielectric and Piezoelectric Ceramics, Providence, Rhode Island (September 26-29, 2001); in Program and Extended Abstracts of The 10th US-Japan Seminar on Dielectric and Piezoelectric Ceramics, pp.391-399, .

• B. Bayram, G.G. Yaralioglu, A.S. Ergun, and B.T. Khuri-Yakub, "Influence of the electrode size and location on the performance of a cMUT [US transducer]," in Ultrasonics Symposium, 2001 IEEE, Atlanta GA, vol.2, pp.949-952, 7-10 Oct. 2001.

• G. Percin, and B.T. Khuri-Yakub, "Micromachined piezoelectrically actuated flextensional transducers for high resolution printing and imaging," in Ultrasonics Symposium, 2001 IEEE , Atlanta GA, vol.2, pp.921-924, 7-10 Oct. 2001.

• G. Percin, and B.T. Khuri-Yakub, "Piezoelectrically actuated flextensional MUTs," Ultrasonics Symposium, 2001 IEEE, Atlanta GA, vol.2, pp.903-906, 7-10 Oct. 2001.

• G. Percin, and B.T. Khuri-Yakub, "Micromachined piezoelectrically actuated flextensional transducers for high resolution printing," in NIP 17 : International Conference on Digital Printing Technologies (Fort Lauderdale, FL), pp. 673 - 678, Sep. 30 - Oct. 5, 2001.

• G. Percin, and B.T. Khuri-Yakub, "Piezoelectrically actuated flextensional micromachined ultrasonic transducers (PAFMUTs)," in UI '01 : Ultrasonics International, Micro-Machined Ultrasonics Transducers, Delft, The Netherlands, , Jul. 2 - 5, 2001.

• S. Hansen, A.S. Ergun, and B.T. Khuri-Yakub, "Sensitive, Wideband Micromachined Capacitive Microphones Using Radio Frequency Detection," in Sensor 2001, Nuremburg, Germany, 8-10 May. 2001; in Sensor 2001 Proceedings (Herausgeber, Germany), pp. 11 – 16, 2001.

• G. Percin, and B.T. Khuri-Yakub, "Micromachined fluid ejector arrays for biotechnological and biomedical applications," in 221st American Chemical Society National Meeting : Advances in Sensor Array Technologies, San Diego, CA, , Apr. 1 - 5, 2001.

• G. Percin, and B.T. Khuri-Yakub, "BioMEMS ejectors for biotech / biomed applications,” in Cambridge Healthtech Institute's Fourth Annual Genomic Partnering : Emerging and Early-Stage Companies, San Francisco, CA," , , Mar. 3 - 4, 2001.

• S.T. Hansen, A.S. Ergun, and B.T. Khuri-Yakub, B.T., "Acoustic sensing using radio frequency detection and capacitive micromachined ultrasonic transducers," in Microwave Symposium Digest, 2001 IEEE MTT-S International, vol.3, pp.2243-2246, 2001.

• C.H, Cheng, A.S. Ergun, and B.T. Khuri-Yakub, "Electrical through-wafer interconnects with sub-picofarad parasitic capacitance [MEMS packaging]," in Microelectromechanical Systems Conference, pp.18-21, 2001, 2001.

• G.G. Yaralioglu, F.L. Degertekin, M.H. Badi, B.A. Auld, and B.T. Khuri-Yakub, "Finite element method and normal mode modeling of capacitive micromachined SAW and Lamb wave transducers," in Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.1, pp.129-132, 22-25 Oct. 2000.

• M.H. Badi, G.G. Yaralioglu, A.S. Ergun, F.L. Degertekin, C.H. Cheng, and B.T. Khuri-Yakub, "A first experimental verification of micromachined capacitive Lamb wave transducers," in Ultrasonics Symposium, 2000 IEEE, San Juan, Puerto Rico, vol.1, pp.311-314, Oct. 22 - 25, 2000.

• C.H. Cheng, E.M. Chow, X.C. Jin, A.S. Ergun, and B.T. Khuri-Yakub, "An efficient electrical addressing method using through-wafer vias for two-dimensional ultrasonic arrays," Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.2, pp.1179-1182, 22-25 Oct. 2000.

• O. Oralkan, X.C. Jin, K. Kaviani, A.S. Ergun, F.L. Degertekin, M. Karaman, and B.T. Khuri-Yakub, "Initial pulse-echo imaging results with one-dimensional capacitive micromachined ultrasonic transducer arrays," in Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.1, pp.959-962, 22-25 Oct. 2000.

• S.T. Hansen, A. Turo, F.L. Degertekin, and B.T. Khuri-Yakub, "Characterization of capacitive micromachined ultrasonic transducers in air using optical measurements," Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.1, pp.947-950, 22-25 Oct. 2000.

• A.S. Ergun, S.T. Hansen, and B.T. Khuri-Yakub, "RF detection for low frequency cMUTS and its comparison to traditional detection," in Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.1, pp.935-938, 22-25 Oct. 2000.

• Y. Roh, and B.T. Khuri-Yakub, "Finite element modeling of capacitor micromachined ultrasonic transducers," in Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.1, pp.905-908, 22-25 Oct. 2000.

• G. Percin, and B.T. Khuri-Yakub, "Micromachined 2-Dimensional array droplet ejectors for controlled deposition of fluids and solid particles," in Cambridge Healthtech Institute's First Annual Macro Results from Micro Arrays Conference : Establishing Leads for Drug Development, Cambridge, MA, , Apr. 3 - 5, 2000.

• B.T. Khuri-Yakub, C.H. Cheng, F.L. Degertekin, A.S. Ergun, S.T. Hansen, X.C. Jin, and O. Oralkan, "Silicon micromachined ultrasonic transducers," in ASME International Mechanical Engineering Congress and Exposition, Orlando, FL, Nov. 5 - 10, 2000; in ASME Noise Control and Acoustic Division - 2000, NCA, NY, vol. 27, pp. 153 - 171, .

• B.T. Khuri-Yakub, C.H. Cheng, F.L. Degertekin, A.S. Ergun, S.T. Hansen, X.C. Jin, O. Oralkan, "Silicon Micromachined Ultrasonic Transducers," in Fifth European Conference on Underwater Acoustics, Lyon, France, pp. 1367 – 1372, 10-13 Jul. 2000.

• S.T. Hansen, B.J. Mossawir, A.S. Ergun, F.L. Degertekin, and B.T. Khuri-Yakub, "Air-coupled nondestructive evaluation using micromachined ultrasonic transducers," in Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE, vol.2, pp.1037-1040, 1999.

• O. Oralkan, X.C. Jin, F.L. Degertekin, and B.T. Khuri-Yakub, "Simulation and experimental characterization of a 2-D, 3-MHz capacitive micromachined ultrasonic transducer (cMUT) array element," in Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE, vol.2, pp.1141-1144, 1999.

• S. Calmes, C.H. Cheng, F.L. Degertekin, X.C. Jin, A.S. Ergun, and B.T. Khuri-Yakub, "Highly integrated 2-D capacitive micromachined ultrasonic transducers," in Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE, vol.2, pp.1163-1166, 1999.

• X.C. Jin, C.H. Cheng, O. Oralkan, S. Calmes, F.L. Degertekin, and B.T. Khuri-Yakub, "Recent Progress in Capacitive Micromachined Ultrasonic Immersion Transducer Arrays," in the Eighth International Symposium on Integrated Circuits, Devices, and Systems, Singapore, Malaysia, pp. 159 – 162, 8-10 Sept. 1999.

• S.L. Morton, F.L. Degertekin, and B.T. Khuri-Yakub, "Ultrasonic monitoring of photoresist processing," in Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, vol. 3677, pp. 340-347, June 1999.

• S.T. Hansen, F.L. Degertekin, and B.T. Khuri-Yakub, "Micromachined ultrasonic transducers for air-coupled nondestructive evaluation," in Proceedings of SPIE, Nondestructive Evaluation of Aging Aircraft, Airports, and Aerospace Hardware III, Ajit K. Mal, Editor, vol. 3586, pp. 310-318, January 1999.

• X.C. Jin, F.L. Degertekin, S. Calmes, X.J. Zhang, I. Ladabaum, and B.T. Khuri-Yakub, "Micromachined capacitive transducer arrays for medical ultrasound imaging," in Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE, vol.2, pp.1877-1880, 1998.

• A. Bozkurt, F.L. Degertekin, A. Atalar, and B.T. Khuri-Yakub, "Analytic modeling of loss and cross-coupling in capacitive micromachined ultrasonic transducers," in Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE, vol.2, pp.1025-1028, 1998.

• S.T. Hansen, N. Irani, F.L. Degertekin, I. Ladabaum, and B.T. Khuri-Yakub, "Defect imaging by micromachined ultrasonic air transducers," in Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE, vol.2, pp.1003-1006, 1998.

• B.T. Khuri-Yakub, F.L. Degertekin, X.C. Jin, S. Calmes, I. Ladabaum, S.T. Hansen, and X.J. Zhang, "Silicon micromachined ultrasonic transducers," in Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE, vol.2, pp.985-991, 1998.

• X.C. Jin, I. Ladabaum, and B.T. Khuri-Yakub, "Surface micromachined capacitive ultrasonic immersion transducers," in Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on, pp.649-654, 25-29 Jan. 1998.

• G. Percin, and B.T. Khuri-Yakub, "Micromachined 2-D array piezoelectrically actuated flextensional transducers and inkjet print heads," in the 194th Meeting of the Electrochemical Society, Boston, MA, Nov. 1 - 6, 1998; Electrochemical Society Proceedings (The Electrochemical Society, Inc., New Jersey, 1998), vol. 98-14, pp. 87 – 93, 1998.

• X.C. Jin, I. Ladabaum, F.L. Degertekin, S. Calmes, and B.T. Khuri-Yakub, "Recent progress in surface micromachined capacitive ultrasonic transducers," in the IEEE International Conference on Solid State and Integrated Circuit Technology, Beijing, China, Oct. 21 - 23, 1998; in Proceedings of IEEE International Conference on Solid State and Integrated Circuit Technology (Institute of Electrical and Electronics Engineers, Inc., New York, 1998), , pp. 880 – 883.

• X.C. Jin, B.T. Khuri-Yakub, F.L. Degertekin, I. Ladabaum, and S. Calmes, "Micromachined capacitive ultrasonic immersion transducer for medical imaging," in the IEEE International Conference on Engineering in Medicine and Biology, Hong Kong, China, Oct. 29 - Nov. 1, 1998; in Proceedings of the 20th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, (Institute of Electrical and Electronics Engineers, Inc., New York, 1998), vol. 20, pp. 779 – 782, .

• G. Percin, and B.T. Khuri-Yakub, "Micromachined 2-D array piezoelectrically actuated flextensional transducers : New designs," in the SPIE Conference on Micromachined Devices and Components IV, Santa Clara, CA, Sep. 21 - 22, 1998; in SPIE Proceedings on Micromachined Devices and Components IV, vol. 3514 (SPIE, Washington, 1998), pp. 411 – 414, .

• B.T. Khuri-Yakub, X.C. Jin, I. Ladabaum, and F.L. Degertekin, "Micromachined capacitive immersion ultrasonic transducers," in the SPIE Conference on Ultrasonic Transducer Engineering, San Diego, CA, Feb. 25 - 26, 1998; in SPIE Proceedings on Ultrasonic Transducer Engineering, (SPIE, Washington, 1998), vol, 3341, pp. 237 – 241, .

• G. Percin, T. Soh, and B.T. Khuri-Yakub, "Resist deposition without spinning by using novel inkjet technology and direct lithography for MEMS," in the SPIE Conference on Advances in Resist Technology and Processing XV, Santa Clara, CA, Feb. 23 - 25, 1998; in SPIE Proceedings on Advances in Resist Technology and Processing XV, (SPIE, Washington, 1998), vol. 3333, pp. 1382 – 1339, .

• S. Morton, F.L. Degertekin, and B.T. Khuri-Yakub, "Ultrasonic cure and temperature monitoring of photoresist during pre-exposure bake process," in the SPIE Conference on Metrology, Inspection, and Process Control for Microlithography XII, Santa Clara, CA, Feb. 23 - 25, 1998; in SPIE Proceedings on Metrology, Inspection, and Process Control for Microlithography XII, (SPIE, Washington, 1998), vol. 3332, pp. 254 – 261, .

• P.E. Roche, A. Hansson, and B.T. Khuri-Yakub, "Control of a drop ejector used as a photoresist dispenser," in Proceedings of SPIE, Smart Structures and Materials 1998: Mathematics and Control in Smart Structures, Vasundara V. Varadan, Editor, vol. 3323, pp. 446-454, July 1998.

• G. Percin, T.H. Soh, and B.T. Khuri-Yakub, "Resist deposition without spinning by using novel inkjet technology and direct lithography for MEMS," in Proceedings of SPIE, Advances in Resist Technology and Processing XV, Will Conley, Editor, vol. 3333, pp. 1382-1389, June 1998.

• X.C. Jin, I. Ladabaum, and B.T. Khuri-Yakub, "The microfabrication of capacitive ultrasonic transducers," in Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on, vol.1, pp.437-440, 16-19 Jun 1997.

• S.L. Morton, F.L. Degertekin, and B.T. Khuri-Yakub, "Ultrasonic cure monitoring of photoresist during pre-exposure bake process," in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.1, pp.837-840, 5-8 Oct 1997.

• I. Ladabaum, X.C. Jin, and B.T. Khuri-Yakub, "Air coupled through transmission of aluminum and other recent results using MUTs," in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.983-986, 5-8 Oct 1997.

• F.L. Degertekin, A. Atalar, and B.T. Khuri-Yakub, "in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE," in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.975-978, 5-8 Oct 1997.

• A. Ronnekleiv, P.E. Roche, and B.T. Khuri-Yakub, "Analysis of micro machinable piezoelectrically driven one dimensional flexural transducers," in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.1061-1065, 5-8 Oct 1997.

• P.M. Roche, and B.T. Khuri-Yakub, "Non-linear dynamics of flexural disc transducers," in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.971-974, 5-8 Oct 1997.

• G. Percin, and B.T. Khuri-Yakub, "Micromachined 2-D array piezoelectrically actuated flextensional transducers," in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.959-962, 5-8 Oct 1997.

• J. Pei, and B.T. Khuri-Yakub, "Plate thickness and transducer distance dual inversion with dry contact ultrasonic Lamb wave transducers," in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.1021-1024, 5-8 Oct 1997.

• I. Ladabaum, X.C. Jin, and B.T. Khuri-Yakub, "Progress in microfabricated ultrasonic transducers," in the 134th Meeting of the Acoustical Society of America, San Diego, CA, , Dec. 1 - 5, 1997.

• A. Rinnekleiv, I. Ladabaum, X.C. Jin, B.T. Khuri-Yakub, "An Improvei circuit model of MUTs," in the IEEE Ultrasonics Symposium, Ontatio, Canada, Oct. 5 - 8, 1997; in 1997 Ultrasonics Symposium Proceedings (Institute of Electrical and Electronics Engineers, Inc., New York, 1997), pp. 395 – 399, 1997.

• B.T. Khuri-Yakub, F.L. Degertekin, and J. Pei, "Novel Applications of Lamb Waves in Process Monitoring," in PIERS '97, Cambridge, MA, Jul. 7 - 11, 1997; in Proceedings of PIERS, Progress in Electromagnetics Research Symposium (Schlumberger-Doll Research, Ridgefield, CT, 1997), p. 321, 1997, .

• R.L. Crane, J.D. Achenbach, S.P. Shah, T.E. Matikas, B.T. Khuri-Yakub, and R.S. Gilmore, "Proceedings of the 1997 MRS Fall Meeting," in Proceedings of the 1997 MRS Fall Meeting, Boston, MA, USA, , Nov 30-Dec 4 1997.

• I. Ladabaum, X.C. Jin, and B.T. Khuri-Yakub, "Miniature drumheads: Microfabricated ultrasonic transducers," in Ultrasonics International '97, Delft, The Netherlands, Jul. 2 - 4, 1997; in Ultrasonics 36, , 25 – 29 Feb. 1998.

• G. Percin, L. Levin, and B.T. Khuri-Yakub, "Piezoelectrically actuated transducer and droplet ejector," in Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE, vol.2, pp.913-916, 3-6 Nov 1996.

• S.L. Morton, A. Hansson, and B.T. Khuri-Yakub, "Ultrasonic monitoring of photoresist prebake using TOF measurement," in Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE, vol.2, pp.1013-1016, 3-6 Nov 1996.

• F.L. Degertekin, B.V. Honein, and B.T. Khuri-Yakub, "Application of surface impedance approach to ultrasonic wave propagation in layered anisotropic media," in Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE, vol.1, pp.559-562, 3-6 Nov 1996.

• J. Pei, B.T. Khuri-Yakub, F.L. Degertekin, B.V. Honein, F.E. Stanke, and K.C. Saraswat, "In situ simultaneous measurement of temperature and thin film thickness with ultrasonic techniques," in Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE, vol.2, pp.1039-1042, 3-6 Nov 1996.

• I. Ladabaum, X.C. Jin, H.T. Soh, F. Pierre, A. Atalar, and B.T. Khuri-Yakub, "Microfabricated ultrasonic transducers: towards robust models and immersion devices," in Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE, 3-6 Nov 1996, vol.1, pp.335-338.

• B.T. Khuri-Yakub, J. Pei, F.L. Degertekin, and K.C. Saraswat, "In situ simultaneous measurement of temperature and thin film thickness with ultrasonic techniques," in the SPIE Conference on Nondestructive Evaluation for Processing Control in Manufacturing, Scottsdale, AZ, Dec. 3 - 5, 1996; in SPIE Proceedings on Nondestructive Evaluation for Processing Control in Manufacturing, (SPIE, Washington, 1996), vol. 2948, pp. 131 – 135, 1996.

• J. Pei, F.L. Degertekin, B.V. Honein, and B.T. Khuri-Yakub, "Erosion / corrosion monitorina with dry contact ultrasonic lamb wave transducers," in the SPIE Conference on Nondestructive Evaluation of Aging Aircraft, Airport, and Aerospace Harware, Scottsdale, AZ, Dec. 3 - 5, 1996; in SPIE Proceedings on Nondestructive Evaluation of Aging Aircraft, Airport, and Aerospace Hardware, (SPIE, Washington, 1996), vol. 2945, pp. 428 – 435, .

• V. Subramanian, F.L. Degertekin, P. Dankoski, B.T. Khuri-Yakub, and K.C. Saraswat, "A novel technique for in-situ monitoring of crystallinity and temperature during rapid thermal annealing of thin Si / Si-Ge films on quartz / glass," in MRS 1996 Spring Meeting, San Francisco, CA, April 8 - 12, 1996; in Flat Panel Display Materials II Symposium Proceedings, pp. 267 – 272, April 8 - 12, 1996.

• K.C. Saraswat, Y. Chen, and B.T. Khuri-Yakub, "Modeling, measurement and control of rapid thermal processing," Transient Thermal Processing Techniques in Electronic Materials. Proceedings of Symposium. Held during the 1996 TMS Annual Meeting, Anaheim, CA, USA, p.3-10, 4-8 Feb. 1996.

• K. Yamada, and B.T. Khuri-Yakub, "Point contact transducer of waveguiding structure for high-frequency operation," in Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE, vol.2, pp.955-959, 7-10 Nov 1995.

• I. Ladabaum, B.T. Khuri-Yakub, D. Spoliansky, and M.I. Haller, "Micromachined ultrasonic transducers (MUTs)," in Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE, vol.1, pp.501-504, 7-10 Nov 1995.

• J. Pei, M.I. Yousuf, F.L. Degertekin, B.V. Honein, and B.T. Khuri-Yakub, "Lamb wave tomography and its application in pipe erosion/corrosion monitoring," in Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE, vol.1, pp.795-798, 7-10 Nov 1995.

• F.K. Degertekin, B.V. Honein, and B.T. Khuri-Yakub, "Efficient excitation and detection of Lamb waves for process monitoring and NDE," in Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE, vol.1, pp.787-790, 7-10 Nov 1995.

• D. Spoliansky, I. Ladabaum, and B.T. Khuri-Yakub, "Micromachined ultrasonic transducers (MUTs)," in the International Conference of Micro- and Nanoengineering, Aix en Provence, France, Sep. 26 - 28, 1995; in Proceedings of the International Conference of Micro- and Nanoengineering, J. Perrocheau, ed. (Elsevier, Holland, 1995), pp. 535 – 538, .

• J. Pei, M.I. Yousuf, F.L. Degertekin, B.V. Honein, and B.T. Khuri-Yakub, "Plate tomography with dry contact lamb wave transducers," in the Conference for Acoustic Imaging, Italy, Sep. 1995; in Acoustic Imaging, P. Tortoli and L. Masotti, eds. (Plenum Press, New York, 1996), vol. 22, pp. 725 – 730, .

• J. Pei, F.L. Degertekin, B.V. Honein, and B.T. Khuri-Yakub, "Erosion / corrosion monitoring with dry contact ultrasonic lamb wave transducers," in Review of Progress in Quantitative Nondestructive Evaluation, Seattle, WA, , Jul. 30 - Aug. 4, 1995.

• B.T. Khuri-Yakub, I. Ladabaum, and D. Spoliansky, "Micromachined ultrasonic air transducers," in Review of Progress in Quantitative Nondestructive Evaluation, Seattle, WA, , Jul. 30 - Aug. 4, 1995.

• G. Posakony, T. Davis, B.T. Khuri-Yakub, and T. Taylor, "In-situ ultrasonic arrays for measuring erosion / corrosion in piping systems," in the 1995 PVP Conference, Performance Demonstration for Wrought Austenetic Welds, , Jul. 1995.

• P. Dankoski, F.L. Degertekin, B.T. Khuri-Yakub, G. Franklin, and K.C. Saraswat, "Toward RTP control using ultrasonic sensors," in the RTP '95 Conference, Amsterdam, The Netherlands, Aug. 30 - Sep. 1, 1995; in RTP '95 Conference Proceedings, pp. 237 – 240, .

• F.L. Degertekin, P. Dankoski, B.T. Khuri-Yakub, and K.C. Saraswat, "In situ ultrasonic wafer temperature sensor for RTP," in the RTP '95 Conference, Amsterdam, The Netherlands, Aug. 30 - Sep. 1, 1995; in RTP '95 Conference Proceedings, pp. 234 – 236, 1995, .

• K.C. Saraswat, Y. Chen, L. Degertekin, and B.T. Khuri-Yakub, "A new flexible rapid thermal processing system," in the Modeling and Simulation of Thin-Film Processing, San Francisco, CA, Apr. 17 - 20, 1995; in Materials Research Society Symposium Proceedings, (Materials Research Society, Pennsylvania, 1995), vol. 389, pp. 307 – 319, .

• K.C. Saraswat, Y. Chen, L. Degertekin, and B.T. Khuri-Yakub, "A new flexible rapid thermal processing system," in the Modeling and Simulation of Thin-Film Processing, San Francisco, CA, Apr. 17 - 20, 1995; in Materials Research Society Symposium Proceedings, (Materials Research Society, Pennsylvania, 1995), vol. 387, pp. 35-47, .

• M.I. Haller, and B.T. Khuri-Yakub, "A surface micromachined electrostatic ultrasonic air transducer," in Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE, 1-4 Nov 1994, vol.2, pp.1241-1244.

• J. Pei, F.L. Degertekin, B.V. Honein, B.T. Khuri-Yakub, and K.C. Saraswat, "In situ thin film thickness measurement using ultrasonics waves," in Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE, vol.2, pp.1237-1240, 1-4 Nov 1994.

• F.L. Degertekin, B.V. Honein, and B.T. Khuri-Yakub, "Tilted sample acoustic microscopy for anisotropy measurement," in Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE, pp.1433-1436, 1-4 Nov 1994, vol.3.

• F.L. Degertekin, J. Pei, B.V. Honein, B.T. Khuri-Yakub, and K.C. Saraswat, "Thin film effects in ultrasonic wafer thermometry," in Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE, vol.3, pp.1337-1341, 1-4 Nov 1994.

• P.E. Roche, and B.T. Khuri-Yakub, "Propagation in finite anisotropic plates of diffracting scalar waves," in Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE, vol.2, pp.679-682, 1-4 Nov 1994.

• Y. Chen, L. Booth, C. Schaper, B.T. Khuri-Yakub, and K.C. Saraswat, "3D modeling of rapid thermal processors for design optimization of a new flexible RTP system," in Electron Devices Meeting, 1994. Technical Digest., International, pp.545-548, 11-14 Dec 1994.

• T. Hoshimiya, and B.T. Khuri-Yakub, "V(z) calculation for a focused beam incident on an inclined plane," in Ultrasonics Symposium, 1993. Proceedings., IEEE 1993, vol.1, pp.603-606, 31 Oct-3 Nov 1993.

• B. Hadimioglu, E.G. Rawson, R. Lujan, M. Lim, J.C. Zesch, B.T. Khuri-Yakub, and C.F. Quate, "High-efficiency Fresnel acoustic lenses," in Ultrasonics Symposium, 1993. Proceedings., IEEE 1993, vol.1, pp.579-582, 31 Oct-3 Nov 1993.

• M.I. Haller, and B.T. Khuri-Yakub, "Tapered acoustic matching layers," in Ultrasonics Symposium, 1993. Proceedings., IEEE 1993, vol.1, pp.505-508, 31 Oct-3 Nov 1993.

• F.L. Degertekin, J. Pei, Y.J. Lee, B.T. Khuri-Yakub, and K.C. Saraswat, "In-situ ultrasonic thermometry of semiconductor wafers," in Ultrasonics Symposium, 1993. Proceedings., IEEE 1993, vol.1, pp.375-377, 31 Oct-3 Nov 1993.

• F.L. Degertekin, J. Pei, and B.T. Khuri-Yakub, "Material characterization using Hertzian point contact transducers," in Ultrasonics Symposium, 1993. Proceedings., IEEE 1993, vol.1, pp.297-299, 31 Oct-3 Nov. 1993.

• Y.J. Lee, F.L. Degertekin, J. Pei, B.T. Khuri-Yakub, and K.C. Saraswat, "In-situ acoustic thermometry and tomography for rapid thermal processing," in Electron Devices Meeting, 1993. Technical Digest., International, pp.187-190, 5-8 Dec 1993.

• F.L. Degertekin, J. Pei, Y.J. Lee, B.T. Khuri-Yakub, and K.C. Saraswati, "In-situ temperature monitoring in RTP by acoustical techniques," in Materials Research Society Symposium Proceedings, vol.303, p.133-138, 1993.

• B. Hadimioglu, and B.T. Khuri-Yakub, "High-frequency ultrasonic techniques," in Proceedings of the Ultrasonics International Conference, p.559-562, 1993.

• M.I. Haller, and B.T. Khuri-Yakub, "Micromachined acoustic matching layers," in Proceedings of SPIE, New Developments in Ultrasonic Transducers and Transducer Systems, Frederick L. Lizzi, Editor, vol. 1733, pp. 72-77, November 1992.

• B. Hadimioglu, S.A. Elrod, D.L. Steinmetz, M Lim, J.C. Zesch, B.T. Khuri-Yakub, E.G. Rawson, and C.F. Quate, "Acoustic ink printing," in Ultrasonics Symposium, 1992. Proceedings., IEEE 1992, vol.2, pp.929-935, 20-23 Oct 1992.

• M.I. Haller, and B.T. Khuri-Yakub, "1-3 composites for ultrasonic air transducers," in Ultrasonics Symposium, 1992. Proceedings., IEEE 1992, vol.2, pp.937-939, 20-23 Oct 1992.

• C.P. Hsieh, and B.T. Khuri-Yakub, "Single point contact measurements of mechanical resonances," in Ultrasonics Symposium, 1992. Proceedings., IEEE 1992, vol.2, pp.787-789, 20-23 Oct 1992.

• B.T. Khuri-Yakub S. Akamine, B. Hadimioglu, H. Yamada and C.F. Quate, "Near-field acoustic microscopy," in Proceedings of SPIE, Scanning Microscopy Instrumentation, Gordon S. Kino, Editor, vol. 1556, pp. 30-39, February 1992.

• C.P. Hsieh, C.H. Chou, and B.T. Khuri-Yakub, "Novel technique of NDE in ceramic bearing balls," in Ultrasonics Symposium, 1991. Proceedings., IEEE 1991, vol.2, pp.891-894, 8-11 Dec 1991.

• M.I. Haller, and B.T. Khuri-Yakub, "Micromachined ultrasonic materials," in Ultrasonics Symposium, 1991. Proceedings., IEEE 1991, vol.1, pp.403-405, 8-11 Dec 1991.

• S. Bhardwaj, S.S. Mohan, R.J. Drozd, B.T. Khuri-Yakub, and K.C. Saraswat, "In-situ film thickness and temperature monitoring using a 2 GHz acoustic phase measurement system," in Ultrasonics Symposium, 1991. Proceedings., IEEE 1991, vol.2, pp.965-967, 8-11 Dec 1991.

• J.C. Zesch, B. Hadimioglu, B.T. Khuri-Yakub, M. Lim, R. Lujan, J. Ho, S. Akamine, D. Steinmetz, C.F. Quate, and E.G. Rawson, "Deposition of highly oriented low-stress ZnO films," in Ultrasonics Symposium, 1991. Proceedings., IEEE 1991, vol.1, pp.445-448, 8-11 Dec 1991.

• S. Akamine, B. Hadimioglu, B.T. Khuri-Yakub, H. Yamada, and C.F. Quate, "Acoustic microscopy beyond the diffraction limit: an application of microfabrication," in Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on, pp.857-859, 24-27 Jun 1991.

• S. Bhardwaj, and B.T. Khuri-Yakub, "In-situ film thickness measurements using acoustic techniques," in Proceedings of SPIE, Advanced Techniques for Integrated Circuit Processing, James A. Bondur, Terry R. Turner, Editors, vol. 1392, pp. 555-562, March 1991.

• Y.J. Lee, C.H. Chou, B.T. Khuri-Yakub, and K.C. Saraswat, "Noncontacting acoustics-based temperature measurement techniques in rapid thermal processing," in Proceedings of SPIE, Rapid Thermal and Related Processing Techniques, Rajendra Singh, Mehrdad M. Moslehi, Editors, vol. 1393, pp. 366-371, April 1991.

• B. Hadimioglu, and B.T. Khuri-Yakub, "Polymer films as acoustic matching layers," in Ultrasonics Symposium, 1990. Proceedings., IEEE 1990, 4-7 Dec 1990, vol.3, pp.1337-1340.

• C. Cinbis, G. Despaux, L. Robert, C.H. Chou, and B.T. Khuri-Yakub, "Ultrasonic in-situ measurement of the marine microlayer," in Ultrasonics Symposium, 1990. Proceedings., IEEE 1990, vol.2, pp.1057-1060, 4-7 Dec 1990.

• C.H. Chou, C.P. Hsieh, and B.T. Khuri-Yakub, "Amplitude and phase acoustic microscopy for ceramic bearing ball inspections," in Ultrasonics Symposium, 1990. Proceedings., IEEE 1990, vol.2, pp.887-890, 4-7 Dec 1990.

• M.D. Howell, B.T. Khuri-Yakub, and G.S. Kino, "Selective rate enhancement of etching processes by acoustic agitation," in Ultrasonics Symposium, 1990. Proceedings., IEEE 1990, vol.2, pp.861-863, 4-7 Dec 1990.

• D.B. Patterson, M.J.F. Digonnet, A.C. Liu, B.T. Khuri-Yakub, and G.S. Kino, "Frequency shifting in optical fiber using a SAW horn," in Ultrasonics Symposium, 1990. Proceedings., IEEE 1990, vol.2, pp.617-620, 4-7 Dec 1990.

• H.F. Routh, E.A. Sivers, H.L. Bertoni, B.T. Khuri-Yakub, and D.D. Waters, "1 GHz differential phase acoustic lens design for surface and subsurface applications," in Ultrasonics Symposium, 1990. Proceedings., IEEE 1990, vol.2, pp.931-935, 4-7 Dec 1990.

• S. Bhardwaj, B.T. Khuri-Yakub, and K.C. Saraswat, "Process monitoring techniques using acoustic waves," in Ultrasonics Symposium, 1990. Proceedings., IEEE 1990, vol.1, pp.367-369, 4-7 Dec 1990.

• Y.J. Lee, C.H. Chou, B.T. Khuri-Yakub, and K.C. Saraswat, "Non-invasive process temperature monitoring using laser-acoustic techniques," in VLSI Technology, 1990. Digest of Technical Papers.1990 Symposium on, pp.105-106, 4-7 Jun 1990.

• K.C. Saraswat, L. Booth, D.D. Grossman, B.T. Khuri-Yakub, Y.J. Lee, M.M. Moslehi, and S. Wood, "Rapid thermal multiprocessing for micro factories," in Proceedings of the SPIE, The International Society for Optical Engineering, vol.1189, p.2-14, 1990.

• M.D. Howell, D.B. Patterson, G.S. Kino, B.T. Khuri-Yakub, and M. Digonnet, "Nd{sup 3+} doped fiber laser with integrated acousto-optic mode-locking," in Proceedings of the SPIE - The International Society for Optical Engineering, vol.1171, p.309-15, 1990.