PUBLICATIONS

Journal Papers

• S. Vaithilingam, T.-J. Ma, Y. Furukawa, I. O. Wygant, X. Zhuang, A. de la Zerda, Ö. Oralkan, A. Kamaya, S. S. Gambhir, R. B. Jeffrey Jr., and B.T. Khuri-Yakub, , "Three-dimensional photoacoustic imaging using a two-dimensional CMUT array,," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 56, no. 11, pp. 2411-19, , Nov. 2009..

• I. O. Wygant, N. S. Jamal, H. J. Lee, A. Nikoozadeh, Ö. Oralkan, M. Karaman, and B. T. Khuri-Yakub, , "An integrated circuit with transmit beamforming flip-chip bonded to a 2-D CMUT array for 3-D ultrasound imaging," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 56, no. 10, pp. 2145-56, , Oct. 2009..

• M. Karaman, I. O. Wygant, Ö. Oralkan, and B. T. Khuri-Yakub, "Minimally redundant 2-D array designs for 3-D medical ultrasound imaging ," Medical Imaging, IEEE Transactions on , vol. 28, no. 7, pp. 1051-1061, Jul. 2009.

• B. T. Khuri-Yakub, Ö. Oralkan, and M. Kupnik, "Next-gen ultrasound ," IEEE Spectrum, vol. 46, no. 5, pp. 44-54, May 2009.

• D. N. Stephens, M. O'Donnell, K. Thomenius, A. Dentinger, D. Wildes, P. Chen, K. K. Shung, J. Cannata, P. Khuri-Yakub, Ö. Oralkan, A. Mahajan, K. Shivkumar, and D. J. Sahn, "Experimental studies with a 9F forward-looking intracardiac imaging and ablation catheter ," Journal of Ultrasound in Medicine, vol. 28, no. 2, pp. 207-215, Feb. 2009.

• I. O. Wygant, M. Kupnik, J. C. Windsor, W. M. Wright, M. S. Wochner, G. G. Yaralioglu, M. F. Hamilton, and B. T. Khuri-Yakub, "50 kHz Capacitive micromachined ultrasonic transducers for generation of highly directional sound with parametric arrays," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 56, no. 1, pp. 193-203, Jan. 2009.

• X. Zhuang, I. O. Wygant, D. Lin, M. Kupnik, Ö. Oralkan, and B. T. Khuri-Yakub, "Wafer-bonded 2-D CMUT arrays incorporating through-wafer trench-isolated interconnects with a supporting frame," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 56, no. 1, pp. 182-192, Jan. 2009.

• Y. Huang, X. Zhuang, E. O. Hæggstrom, A. S. Ergun, C.-H. Cheng, and B. T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers with piston-shaped membranes: Fabrication and experimental characterization," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 56, no. 1, pp. 136-145, Jan. 2009.

• A. Nikoozadeh, I. O. Wygant, D. Lin, Ö. Oralkan, A. S. Ergun, D. N. Stephens, K. E. Thomenius, A. M. Dentinger, D. Wildes, G. Akopyan, K. Shivkumar, A. Mahajan, D. J. Sahn, and B. T. Khuri-Yakub, "Forward-looking intracardiac ultrasound imaging using a 1-D CMUT array integrated with custom front-end electronics," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 12, pp. 2651-2660, Dec. 2008.

• A. de la Zerda, C. Zavaleta, S. Keren, S. Vaithilingam, S. Bodapati, Z. Liu, J. Levi, B. R. Smith, T.-J. Ma, O. Oralkan, Z. Cheng, X. Chen, H. Dai, B. T. Khuri-Yakub, and S. S. Gambhir, "Carbon nanotubes as photoacoustic molecular imaging agents in living mice," Nature Nanotechnology, vol. 3, pp. 557-562, Sep. 2008.

• S. H. Wong, M. Kupnik, X. Zhuang, D.-S. Lin, K. Butts-Pauly, and B. T. Khuri-Yakub, "Evaluation of Wafer Bonded CMUTs with Rectangular Membranes Featuring High Fill Factor," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 9, pp. 2053-2065, Sep. 2008.

• D. N. Stephens, J. Cannata, R. Liu, J. Zhao, K. K. Shung, H. Nguyen, R. Chia, A. Dentinger, D. Wildes, K. E. Thomenius, A. Mahajan, K. Shivkumar, K. Kim, M. O’Donnell, A. Nikoozadeh, Ö. Oralkan, P. T. Khuri-Yakub, and David Sahn, "Multifunctional catheters combining intracardiac ultrasound imaging and electrophysiology sensing," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 7, pp. 1570-1581, Jul. 2008.

• X. Zhuang, D. S. Lin, Ö. Oralkan, and B. T. Khuri-Yakub, "Fabrication of flexible transducer arrays with through-wafer electrical interconnects based on trench refilling with PDMS," Microelectromechanical Systems, Journal of, vol. 17, no. 2, pp. 446-452, May 2008.

• S. H. Wong, R. D. Watkins, M. Kupnik, K. Butts-Pauly, and B. T. Khuri-Yakub, "Feasibility of MR-Temperature Mapping of Ultrasonic Heating from a CMUT," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 4, pp. 811-818, April 2008.

• I. Wygant, X. Zhuang, D. Yeh, Ö. Oralkan, A. S. Ergun, M. Karaman, and B. T. Khuri-Yakub, "Integration of 2D CMUT arrays with front-end electronics for volumetric ultrasound imaging," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 2, pp. 327-342, Feb. 2008.

• Y. Huang, X. Zhang, E. O. Haeggstrom, A. S. Ergun, C.-H. Cheng, and B. T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers (CMUTs) with isoloation posts," Ultrasonics, vol. 48, pp. 74-81, 2008.

• K. K. Park, H. J. Lee, G. G. Yaralioglu, Ö. Oralkan, M. Kupnik, C. F. Quate, B. T. Khuri-Yakub, T. Braun, H. P. Lang, M. Hegner, C. Gerber, and J. Gimzewski, "Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen," Applied Physics Letters, Lett. 91, 094102, 2007.

• X. Zhuang, A. S. Ergun, Y. Huang, I. O. Wygant, O. Oralkan, and B. T. Khuri-Yakub, "Integration of trench-isolated through-wafer interconnects with 2D capacitive micromachined ultrasonic transducer arrays," Sensors and Actuators A: Physical, vol. 138, pp.221-229, July 2007.

• X. Zhuang, A. Nikoozadeh, M. A. Beasley, G. G. Yaralioglu, B. T. Khuri-Yakub and B. L. Pruitt, "Biocompatible coatings for CMUTs in a harsh, aqueous environment," Jounal of Micromechanics and Microengineering, vol.17, pp. 994- 1001, 2007.

• B. Bayram, M. Kupnik, G. G. Yaralioglu, Ö. Oralkan, A. S. Ergun, D. Lin, S. H. Wong, and B. T. Khuri-Yakub, "Finite element modeling and experimental characterization of crosstalk in 1-D CMUT arrays," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 54, no. 2, pp. 418- 430, Feb. 2007.

• S.H. Wong, G.C. Scott, S.M. Conolly, G. Narayan, D. H. Liang, "Feasibility of noncontact intracardiac ultrasound ablation and imaging catheter for treatment of atrial fibrillation," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 53, no. 2, pp. 2394-2405 , Dec. 2006.

• Y.L. Huang, E. Haeggstrom, B. Bayram,X.F. Zhuang, A. S. Ergun, C.H. Cheng, B. T. Khuri-Yakub, "Comparison of conventional and collapsed region operation of capacitive micromachined ultrasonic transducers," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 53, no. 10, pp. 1918- 1932, Oct. 2006.

• O. Oralkan, B. Bayram, G.G. Yaralioglu, A.S. Ergun, M. Kupnik, D.T. Yeh, I.O. Wygant and B.T. Khuri-Yakub, "Experimental characterization of collapse-mode CMUT operation," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 53, no. 8, pp. 1513- 1523, Aug. 2006.

• M. Kupnik, A. Schroder, P. O'Leary, E. Benes, and M. Groeschl, "Adaptive pulse repetition frequency technique for an ultrasonic transit-time gas flowmeter for hot pulsating gases," Sensors Journal, IEEE, vol. 6, no. 4, pp. 906- 915, Aug. 2006.

• D. R. M. Crooks, G. Cagnoli, M. M. Fejer, G. Harry, J. Hough, B. T. Khuri-Yakub, S. Penn, R. Route, S. Rowan, P. H. Sneddon, I. O. Wygant and G. G. Yaralioglu, "Experimental measurements of mechanical dissipation associated with dielectric coatings formed using SiO2, Ta2O5 and Al2O3," Classical and Quantum Gravity, vol. 23, no. 15, pp. 4953- 4953, Aug. 2006.

• D.T. Yeh, O. Oralkan, I.O. Wygant, M. O'Donnell, and B.T. Khuri-Yakub, "3-D ultrasound imaging using a forward-looking CMUT ring array for intravascular/intracardiac applications," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 53, no. 6, pp. 1202- 1211, June 2006.

• B.T. Khuri-Yakub, A.S. Ergun, O. Oralkan, S. Vaithilingam, I.O. Wygant, G.G. Yaralioglu and X. Zhuang, "Micromachined transducers enable real-time three-dimensional imaging," SPIE Newsroom [Online], 10.1117/2.1200603.0183 Page 2/3, 2006.

• A.S. Ergun, Y. Huang, X. Zhuang, O. Oralkan, G.G. Yarahoglu, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers: fabrication technology," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 12, pp. 2242- 2258, Dec. 2005.

• G.G. Yaralioglu, S.A. Ergun, and B.T. Khuri-Yakub, "Finite-element analysis of capacitive micromachined ultrasonic transducers," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 12, pp. 2185- 2198, Dec. 2005.

• B. Bayram, G.G. Yaralioglu, M. Kupnik, A.S. Ergun, O. Oralkan, A. Nikoozadeh, and B.T. Khuri-Yakub, "Dynamic analysis of capacitive micromachined ultrasonic transducers," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 12, pp. 2270- 2275, Dec. 2005.

• B.T. Khuri-Yakub, "Introduction to the special issue on micromachined ultrasonic transducers," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 12, pp. 2162- 2162, Dec. 2005.

• U. Demirci, G.G. Yaralioglu, E. Haeggstrom, and B.T. Khuri-Yakub, "Femtoliter to picoliter droplet generation for organic polymer deposition using single reservoir ejector arrays," Semiconductor Manufacturing, IEEE Transactions on, vol. 18, no. 4, pp. 709- 715, Nov. 2005.

• F. Bellan, A. Bulletti, L. Capinieri, L. Masotti, G.G. Yaralioglu, F.L. Degertekin, B.T. Khuri-Yakub, F. Guasti, and E. Rosi, "A new design and manufacturing process for embedded lamb-wave interdigital transducers based on piezopolymer film," Sensors and Actuators, A : Physical, vol. 123 - 124, pp. 379 - 387, Sep. 23, 2005.

• T.C. Marentis, B. Kusler, G.G.Yaralioglu, S.J. Liu, E.O. Haeggstrom, and B.T. Khuri-Yakub, "Microfluidic sonicator for real-time disruption of eukaryotic cells and bacterial spores for DNA analysis," Ultrasound in Medicine and Biology, vol. 31, no. 9, pp. 1265-1277, Sep. 2005.

• Y. Huang, E.O. Haeggstrom, X. Zhuang, A.S. Ergun, and B.T. Khuri-Yakub, "A solution to the charging problems in capacitive micromachined ultrasonic transducers," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, Vol. 52, no.4, pp. 578- 580 , April 2005.

• B. Bayram, O. Oralkan, A.S. Ergun, E. Haeggstrom, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducer design for high power transmission," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 2, pp. 326- 339, Feb. 2005.

• J.A. Johnson, O. Oralkan, S. Ergun, U. Demirci, M. Karaman, and B.T. Khuri-Yakub, "Coherent array imaging using phased subarrays. Part II: simulations and experimental results," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 1, pp. 51- 64, Jan. 2005.

• J.A. Johnson, M. Karaman, and B.T. Khuri-Yakub, "Coherent-array imaging using phased subarrays. Part I: basic principles," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 1, pp. 37- 50, Jan. 2005.

• U. Demirci, G.G. Yaralioglu, E. Haeggstrom, G. Percin, S. Ergun, and B.T. Khuri-Yakub, "Acoustically actuated flextensional Si/sub x/N/sub y/ and single-crystal silicon 2-D micromachined ejector arrays," Semiconductor Manufacturing, IEEE Transactions on, vol. 17, no. 4, pp. 517- 524, Nov. 2004.

• S.T. Hansen, A.S. Ergun, W.Liou, B.A. Auld, and B.T. Khuri-Yakub, "Wideband micromachined capacitive microphones with radio freq. detection," J. Acst. Soc. Am., vol. 116 (2), Aug. 2004.

• G.G. Yaralioglu, I.O. Wygant, T.C. Marentis, and B.T. Khuri-Yakub, "Ultrasonic mixing in microfluidic channels using integrated transducers," Anal. Chem.; (article), 76 (13); 3694-3698, Jul. 1, 2004.

• U. Demirci, A.S. Ergun, O. Oralkan, M. Karaman, and B.T. Khuri-Yakub, "Forward-viewing CMUT arrays for medical imaging," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 51, no. 7, pp. 887- 895, July 2004.

• O. Oralkan, A.S. Ergun, C.H. Cheng, J.A. Johnson, M. Karaman, T.H. Lee, and B.T. Khuri-Yakub, "Volumetric ultrasound imaging using 2-D CMUT arrays," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 50, no. 11, pp. 1581- 1594, Nov 2003.

• M.H. Badi, G.G. Yaralioglu, A.S. Ergun, S.T. Hansen, E.J. Wong, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 50, no. 9, pp. 1191- 1203, Sept. 2003.

• B. Bayram, E. Haeggstrom, G.G. Yaralioglu, and B.T. Khuri-Yakub, "A new regime for operating capacitive micromachined ultrasonic transducers," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on , vol. 50, no. 9, pp. 1184- 1190, Sept. 2003.

• G. Percin, and B.T. Khuri-Yakub, "Photoresist deposition without spinning," IEEE Trans. on Semiconductor Manufacturing, vol. 16, no. 3, pp. 452 - 459, Aug. 2003.

• K. Kaviani, O. Oralkan, B.T. Khuri-Yakub, and B.A. Wooley, "A multichannel pipeline analog-to-digital converted for an integrated 3-D ultrasound imaging system," IEEE Journal of Solid-State Circuits, vol. 38, no. 7, pp. 1266 - 1270, Jul. 2003.

• A.S. Ergun, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers : Theory and technology," Journal of Aerospace Engineering, vol. 16, no. 2, pp. 76 - 84, Apr. 2003.

• Y. Huang, A.S. Ergun, E. Haeggstrom, M.H. Badi, and B.T. Khuri-Yakub, "Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology," Microelectromechanical Systems, Journal of , vol. 12, no. 2, pp. 128- 137, Apr 2003.

• G.G. Yaralioglu, A.S. Ergun, B. Bayram, E. Haeggstrom, and B.T. Khuri-Yakub, "Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 50, no. 4, pp. 449- 456, April 2003.

• G. Percin, and B.T. Khuri-Yakub, "Piezoelectric droplet ejector for ink-jet printing of fluids and solid particles," Rev. Sci. Instrum., (in press), Feb. 2003.

• G. Percin, G.G. Yaralioglu, and B.T. Khuri-Yakub, "Micromachined droplet ejector arrays," Rev. Sci. Instrum.; in Virtual Journal of Nanoscale Science & Technology, vol. 73, no. 12, pp. 4385 - 4389; vol. 6, no. 23, Dec. 2002; Dec. 2, 2002.

• O. Oralkan, A.S. Ergun, J.A. Johnson, M. Karaman, U. Demirci, K. Kaviani, T.H. Lee, and B.T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 49, no. 11, pp. 1596- 1610, Nov 2002.

• G. Percin, and B.T. Khuri-Yakub, "Piezoelectrically actuated flextensional micromachined ultrasound transducers. I. Theory," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 49, no. 5, pp.573-584, May 2002.

• G. Percin, and B.T. Khuri-Yakub, "Piezoelectrically actuated flextensional micromachined ultrasound droplet ejectors," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.49, no.6, pp.756-766, Jun 2002.

• G. Percin, and B.T. Khuri-Yakub, "Piezoelectrically actuated flextensional micromachined ultrasound transducers. II. Fabrication and experiments," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.49, no.5, pp.585-595, May 2002.

• G. Percin, and B.T. Khuri-Yakub, "Micromachined droplet ejector arrays for controlled ink-jet printing and deposition," Rev. Sci. Instrum., also in Virtual Journal of Nanoscale Science & Technology, vol. 5, vol. 73, pp. 2193 - 2196, May 6, 2002.

• J.A. Johnson, O Oralkan, U. Demirci, S. Ergun, M. Karaman, and B.T. Khuri-Yakub, "Medical imaging using capacitive micromachined ultrasonic transducerarrays," Ultrasonics, vol. 40, pp. 471 - 476, May 2002.

• Y. Roh, and B.T. Khuri-Yakub, "Finite element analysis of underwater capacitor micromachined ultrasonic transducers," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on , vol.49, no.3, pp.293-298, Mar 2002.

• G. Percin, and B.T. Khuri-Yakub, "Piezoelectrically actuated flextensional micromachined ultrasonic transducers," Ultrasonics, vol. 40, pp. 441 - 448, Feb. 2002.

• X.C. Jin, O. Oralkan, F.L. Degertekin, and B.T. Khuri-Yakub, "Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.48, no.3, pp.750-760, May 2001.

• G.G. Yaralioglu, M.H. Badi, A.S. Ergun, C.H. Cheng, B.T. Khuri-Yakub, and F.L. Degertekin, "Lamb wave devices using capacitive micromachined ultrasonic transducers," Appl. Phys. Lett., vol. 78, pp. 111 - 113, Jan. 2001.

• J.P. Raskin, A.R. Brown, and B.T. Khuri-Yakub, G.M. Rebeiz, "A novel parametric-effect MEMS amplifier," Microelectromechanical Systems, Journal of, vol.9, no.4, pp.528-537, Dec 2000.

• B.T. Khuri-Yakub, C.H. Cheng, F.L. Degertekin, A.S. Ergun, S.T. Hansen, X.C. Jin, O. Oralkan, "Silicon micromachined ultrasonic transducers," Jpn. J. Appl. Phys., vol. 39, pp. 2883 - 2887, May 2000.

• S.L. Morton, F.L. Degertekin, and B.T. Khuri-Yakub, "Ultrasonic sensor for photoresist process monitoring," Semiconductor Manufacturing, IEEE Transactions on, vol.12, no.3, pp.332-339, Aug 1999.

• A. Bozkurt, I. Ladabaum, A. Atalar, and B.T. Khuri-Yakub, "Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.46, no.6, pp.1364-1374, Nov 1999.

• O. Oralkan, X.C. Jin, F.L. Degertekin, and B.T. Khuri-Yakub, "Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.46, no.6, pp.1337-1340, Nov 1999.

• X.C. Jin, I. Ladabaum, F.L. Degertekin, S. Calmes, and B.T. Khuri-Yakub, "Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers," Microelectromechanical Systems, Journal of, vol.8, no.1, pp.100-114, Mar 1999.

• G. Percin, T.S. Lundgren, and B.T. Khuri-Yakub, "Controlled ink-jet printing and deposition of organic polymers and solid particles," Appl. Phys. Lett., vol. 73, pp. 2375 - 2377, Oct. 1998.

• S.L. Morton, F.L. Degertekin, and B.T. Khuri-Yakub, "In situ ultrasonic monitoring of photoresist development," Appl. Phys. Lett., vol. 73, pp. 2215 - 2217, Oct. 1998.

• X.C. Jin, I. Ladabaum, and B.T. Khuri-Yakub, "The microfabrication of capacitive ultrasonic transducers," Microelectromechanical Systems, Journal of , vol.7, no.3, pp.295-302, Sep. 1998.

• F.L. Degertekin, A. Atalar, and B.T. Khuri-Yakub, "Micromachinable ultrasonic leaky wave air transducers," Appl. Phys. Lett., vol. 73, pp. 741 - 743, Aug. 1998.

• I. Ladabaum, X.C. Jin, H.T. Soh, A. Atalar, and B.T. Khuri-Yakub, "Surface micromachined capacitive ultrasonic transducers," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.45, no.3, pp.678-690, May 1998.

• S.L. Morton, F.L. Degertekin, and B.T. Khuri-Yakub, "In situ ultrasonic measurement of photoresist glass transition temperature," Appl. Phys. Lett., vol. 72, pp. 2457 - 2459, May 1998.

• G. Percin, A. Atalar, F.L. Degertekin, and B.T. Khuri-Yakub, "Micromachined two-dimensional array piezoelectrically actuated transducers," Appl. Phys. Lett., vol. 72, pp. 1397 - 1399, Mar. 1998.

• I. Ladabaum, X.C. Jin, and B.T. Khuri-Yakub, "Miniature drumheads : microfabricated ultrasonic transducers," Ultrasonics, vol. 36, pp. 25 - 29, Feb. 1998.

• G. Percin, L. Levin, and B.T. Khuri-Yakub, "Piezoelectrically actuated droplet ejector," Rev. Sci. Instrum., vol. 68, pp. 4561 - 4563, Dec. 1997.

• V. Subramanian, P. Dankoski, L. Degertekin, B.T. Khuri-Yakub, and K.C. Saraswat, "Controlled two-step solid-phase crystallization for high-performance polysilicon TFT's," Electron Device Letters, IEEE, vol.18, no.8, pp.378-381, Aug 1997.

• F.L. Degertakin, and B.T. Khuri-Yakub, "Lamb wave excitation by Hertzian contacts with applications in NDE," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.44, no.4, pp.769-779, Jul 1997.

• V. Subramanian, F.L. Degertekin, P. Dankoski, B.T. Khuri-Yakub, and K.C. Saraswat, "In Situ Monitoring of Crystallinity and Temperature During Rapid Thermal Crystallization of Silicon on Glass," J. Electrochem. Soc., vol. 144, pp. 2216 - 2221, Jun. 1997.

• H.T. Soh, I. Ladabaum, A. Atalar, C.F. Quate, and B.T. Khuri-Yakub, "Silicon micromachined ultrasonic immersion transducers," Appl. Phys. Lett., vol. 69, pp. 3674 - 3676, Dec. 1996.

• J. Pei, M.I. Yousuf, F.L. Degertekin, B.V. Honein, and B.T. Khuri-Yakub, "Lamb wave tomography and its application in pipe erosion / corrosion monitoring," Res. Nondestr. Eval., vol. 8, pp. 189 - 197, Dec. 1996.

• F.L. Degertekin, and B.T. Khuri-Yakub, "Single mode lamb wave excitation in thin plates by hertzian contacts," Appl. Phys. Lett., vol. 69, pp. 146 - 148, Jul. 1996.

• K. Yamada, and B.T. Khuri-Yakub, "Point Contact Ultrasonic Transducer of Waveguiding Structure for High-Freq. Operation," Appl. Phys. Lett., vol. 68, pp. 1335 - 1337, Mar. 1996.

• Y.J. Lee, B.T. Khuri-Yakub, and K. Saraswat, "Temperature measurement in rapid thermal processing using the acoustic temperature sensor," Semiconductor Manufacturing, IEEE Transactions on, vol.9, no.1, pp.115-121, Feb 1996.

• M.I. Haller, and B.T. Khuri-Yakub, "A surface micromachined electrostatic ultrasonic air transducer," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.43, no.1, pp.1-6, Jan 1996.

• I. Ladabaum, B.T. Khuri-Yakub, and D. Spoliansky, "Micromachined ultrasonic transducers (MUTs) : 11.4 MHz transmission in air and more," Appl. Phys. Lett., vol. 68, pp. 7 - 9, Jan. 1996.

• D. Spoliansky, I. Ladabaum, and B.T. Khuri-Yakub, "Micromachined ultrasonic air transducers (MUTs)," Microelectric Engineering, vol. 30, pp. 535 - 538, Jan. 1996.

• F.L. Degertekin, and B.T. Khuri-Yakub, "Hertzian contact transducers for nondestructive evaluation," J. Acoustical Society of America, vol. 99, pp. 299 - 308, Jan. 1996.

• J. Pei, F.L. Degertekin, B.T. Khuri-Yakub, and K.C. Saraswat, "In-situ thin film thickness measurement with acoustic lamb waves," Appl. Phys. Lett., vol. 66, pp. 2177 - 2179, Apr. 1995.

• K.C. Saraswat, P.P Apte, L. Booth, Y. Chen. P.C. Dankoski, F.L. Degertekin, G.F. Franklin, B.T. Khuri-Yakub, M.M. Moslehi, C. Schaper, P.J. Gyugyi, Y.J. Lee, J. Pei, and S.C. Wood, "Rapid thermal multiprocessing for a programmable factory for adaptable manufacturing of ICs," Semiconductor Manufacturing, IEEE Transactions on, vol.7, no.2, pp.159-175, May 1994.

• F.L. Degertekin, J. Pei, B.T. Khuri-Yakub, and K.C. Saraswat, "In situ acoustic temperature tomography of semiconductor wafers," Applied Physics Letters, vol.64, no.11, p.1338-40, March 1994.

• M.I. Haller, and B.T. Khuri-Yakub, "Micromachined 1-3 composites for ultrasonic air transducers," Review of Scientific Instruments, vol.65, no.6, p.2095-8, June 1994.

• Y.J. Lee, B.T. Khuri-Yakub , and K.C. Saraswat, "Temperature measurement in rapid thermal processing using acoustic techniques," Review of Scientific Instruments, vol.65, no.4, pt.1, p.974-6, April 1994.

• B.T. Khuri-Yakub, "Scanning acoustics microscopy," Ultrasonics, vol.31, no.5, p.361-372, Sept. 1993.

• C.P. Hsieh, and B.T. Khuri-Yakub, "One-point contact measurement of spherical resonances," Applied Physics Letters, vol.62, no.24, p.3091-3093, 14 June 1993.

• C. Cinbis, N.N. Mansour, and B.T. Khuri-Yakub, "Effect of surface tension on the acoustic radiation pressure-induced motion of the water-air interface," Journal of the Acoustical Society of America, vol.94, no.4, p.2365-72, Oct. 1993.

• C.P. Hsieh, and B.T. Khuri-Yakub, "Surface defect inspection of spherical objects by the resonant sphere technique," Applied Physics Letters, vol.60, no.15, p.1815-1817, 13 Apr. 1992.

• C. Cinbis and B.T. Khuri-Yakub, "A noncontacting technique for measuring surface tension of liquids," Review of Scientific Instruments, vol.63, no.3, p.2048-2050, Mar. 1992.

• P.A. Reinholdtsen, and B.T. Khuri-Yakub, "Image processing for a scanning acoustic microscope that measures amplitude and phase," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.38, no.2 pp.141-147, Mar 1991.

• D.B. Patterson, M.D. Howell, M. Digonnet, G.S. Kino, and B.T. Khuri-Yakub, "Noninvasive switchable acousto-optic taps for optical fiber," Lightwave Technology, Journal of , vol.8, no.9, pp.1304-1312, Sep 1990.

• D.B. Patterson, M.D. Howell, M. Digonnet, G.S. Kino, and B.T. Khuri-Yakub, "Switchable acoustooptic tap for optical fibers," Technical Digest Series, p.98, 1990.

• P.A. Reinholdtsen, and B.T. Khuri-Yakub, "Amplitude and phase acoustic microscope using digital heterodyning," Review of Scientific Instruments, vol.61, no.4, p.1236-42, April 1990.

• U. Keller, K.D. Li, B.T. Khuri-Yakub, D.M. Bloom, K.J. Weingarten, and D.C. Gerstenberger, "High-frequency acousto-optic mode locker for picosecond pulse generation," Optics Letters, vol.15, no.1, p.45-7, 1 Jan. 1990.