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  • CMUTs
    • General Description
    • History
    • Principles
  • modeling
    • Analytical Equivalent Circuit Model
    • Finite Element Modeling
  • fabrication and packaging
    • Sacrificial Release (Surface Micromachining) Process
    • Wafer Bonding (Bulk Micromachining) Process
    • Interconnection Schemes for Large Transducer Arrays
    • Integration with Electronic Circuits
  • characterization
    • Electrical Input Impedance Measurements
    • Pulse-echo Measurements
    • Optical Displacement Measurements
    • Acoustical Crosstalk
  • ultrasonic imaging and therapeutics
    • Conventional 2D Imaging
    • Integrated Circuits for CMUTs
    • High-Resolution 2D Imaging
    • 3D Imaging Using 2D CMUT Arrays
    • 3D Intravascular and Intracardiac Imaging
    • 3D Photoacoustic Imaging
    • 3D Beamformer Design
    • Real-Time Data Acquisition and Beamforming System Design
    • Sonar and Portable Underwater Camera
    • Therapeutic Ultrasound
  • airborne ultrasound
    • Nondestructive Evaluation
    • Micromachined Capacitor Microphones
    • Ultrasonic Flow Metering
  • micromachined chemical/biological sensors
  • ultrasonic sensors
    • High Frequency Phase Measurement of Cure State of Photoresist
  • microfluidics and lab-on-chip
    • Smart Microfluidic Channels
    • Microejectors
    • Microsonicator
  • Capacitive Micromachined SAW and Lamb Wave Transducers
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