Microejectors

Ejection of small particles and liquids has many applications ranging from bio-technology to IC fabrication. In this project out aim is to eject photoresist from an ejector. This will reduce the waste due to the spin coating of photoresist on wafer surfaces as well as enable direct writing of features for MEMS applications.

 

 

 

FIGURE 1. Large scale ejector.

 

 

 

FIGURE 2. Ejection of photoresist (left) and water (right).

 

 

 

FIGURE 3. 2D MEMS ejector array.

 

 

 

FIGURE 4. Ejection of 5-um water droplets using 1.24 MHz excitation.

 

 

 

FIGURE 5. Interdigital ejector array.

 

 

 

FIGURE 6. 30-um droplet generation from open pool.